The need to recycle, reclaim or in some way reuse, ultrapure deionized water in fabs is apparent.
Today, companies large and small are utilizing some water conservation or reuse.
Since water is either dried on the surface of the wafer in spin dryers or displaced from the surface with isopropyl alcohol, The concentration of impurities in water must be much lower than even the most sensitive chemicals, similar to hydrofluoric acid. The industry was badly burnt by striving to recycle back in the ’80s, when attempts at ultrapure water recycling caused gigantic production upsets and fab shutdowns. That said, That’s a fact, it’s the most heavily ‘usedand’ no longer the ‘cheapest chemical’ that removes other chemicals from wafer surfaces.
The semiconductor industry’s response to perfluorinated compounds PFCs started in the 1990s when the climate change impacts of PFCs was becoming better understood with unilateral action by ‘gas supplier’ DuPont.
That said, an industrial revolution is in the making, equivalent some say to the introduction of steam power at the tail end of the 18th century.
Known as smart manufacturing, Industry 0, the industrial internet of things, or simply the fourth industrial revolution, the movement will radically change how manufacturing is done. You may use these HTML tags and attributes. For 18 megohm DI water at ‘point of use’. Anions and cations in feedwater pass through ion exchanger resins and replace the attached hydrogen and hydroxyl ions. Let me tell you something. Just think for a moment.
The hydrogen and hydroxyl ions so combine to form pure water molecules.
Interestingly, industry observers predict it won’t be long before pharmaceutical water systems will closely resemble those found in microelectronics facilities.
Millipore’s Milli Q and Elix Systems supply Type 2 purfied water for media preparation, instruments or feedwater to a polisher via EDI technology. Eventually, eDI uses an ion exchange resin, ion exchange membrane and dc voltage to remove ions from water. You can find a lot more info about this stuff here. Oftentimes intel has also been working with its suppliers to find more efficient ways of producing ultrapure water. Ok, and now amongst the most important parts. Besides, our new ‘technologies quarter micron generation’ and beyond are using a newly designed piece of equipment that requires significantly less amounts of water and chemicals.
If we weren’t doing water conservation in other areas through reduction. We probably will have gone to recycling and probably overengineered it.
The approaching transition from 200 mm to 300 mm wafers has there’s that if you continue using the old design and just make it larger just scale ‘ityoure intending to pay a big price.
In others, it’s not, In So it’s quite simple to do since the feedwater is very clean. Poliak sums it up. With that said, poliak says, For nearly any gallon of raw water, we produce as much ultra pure water as possible. Certainly, intel is actively and aggressively keeping up the pressure on equipment suppliers to hold chemical and water usage on a per wafer basis within bounds.
Equipment requires less water to rinse wafers being that Says Rich Poliak, We’ve already been working with our equipment suppliers on the next generation tools.
Our estimate for a typical factory is that the new wet stations will save us about 300000 gallons a day.
The difficulty is that the ability to do that changes, determined by the water source being that water quality ain’t identical all over the place. By the way, a major thrust area going to be the development of sensors and metrology for measuring resistivity and detecting upsets. He says research shows that with proper system design, the use of recycled water has actually improved the efficiency of known quantity, says Shadman, due to its kinds of contaminants. Farhang Shadman, Professor of Chemical and Environmental Engineering at the University of Arizona, says projects been carefully selected with an eye to improving yield and reducing costs. Her recommendations are adopted by SEMI/Sematech as acceptable criteria and are widely considered the highest in the industry. While many companies are already recycling and conserving waste streams in more non critical areas reclaiming UPW for cooling towers or reducing the flows on sinks, for examplesuch efforts are somewhat ad hoc and do not involve system redesign or new tool technology, that experts like Balazs say are essential to arriving at a reliable UPW/DI water system which can withstand upsets.
Balazs says they have no clear idea about what this a type system should involve, how it could be configured, or have not left enough space to accommodate it, nonetheless most have built some particular system, with room for future recycling possibilities in mind. On the contrary, most fabs are not designed to recycle water in any appreciable quantity.