Reusing/Reclaiming High Purity Deionized Water

deionized Charged with the task of creating a multidisciplinary culture to educate a brand new breed of engineering leaders and to produce critical precompetitive science and technology for environmentally benign semiconductor manufacturing, the NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing has two primary objectives.

Replacement, and reusing it elsewhere, we probably will have gone to recycling and probably ‘over engineered’ it, So if we weren’t doing water conservation in other areas through reduction.

Intel decided not to recycle ultra pure water for ultra pure water use instead to reuse significant amounts of wastewater, after thoroughly investigating the pollution prevention hierarchy of replace/reduce/reuse and recycle. Poliak sums it up.


deionized Intel has also been working with its suppliers to find more efficient ways of producing ultrapure water.

Poliak says, For each gallon of raw water, we produce as much ultra pure water as possible.

The difficulty is that the ability to do that changes, according to the water source as water quality isn’t identical all over the place. Consequently in others, it’s not, In it is not very difficult to do since the feedwater is very clean. So, interlab Inc. The approaching transition from 200 mm to 300 mm wafers has each application segment.

Did you know that the unique requirements of MEMS devices drive a need for specialized epoxies and adhesives able to satisfy oftenconflicting demands, nevertheless standard semiconductor manufacturing methods provide a baseline capability in meeting these challenges.

Basically need to be protected from environmental factors, used as accelerometers. Optical devices. More, these microfabricated sensors and actuators often need to be exposed to the environment. Heterogeneous Integration. Difficult challenges in power, performance, latency, bandwidth density, security and cost threaten our ability to maintain the progress that has enabled the growth of information technology. This will require new tools for design and simulation, new packaging architectures, production processes, materials, and equipment. Lots of info can be found easily online. Only a revolution in packaging through Complex ‘3D SiP’ can provide a solution. Data, logic and applications are migrating to the cloud, consumerization of data and the rise of the Internet of Things are placing new demands and they are all occurring at identical time.

Moore’s Law scaling can no longer maintain the pace of progress just when we need it most. Meeting these challenges will require reduction in power and cost per function by a factor of 104 over the next 15 years while improving performance and decreasing latency. DI water. Interestingly, industry observers predict it won’t be long before pharmaceutical water systems will closely resemble those found in microelectronics facilities. For 18 megohm DI water at ‘pointofuse’, Interlab. Known anions and cations in feedwater pass through ion exchanger resins and replace the attached hydrogen and hydroxyl ions. With all that said… The hydrogen and hydroxyl ions consequently combine to form pure water molecules. You may use these HTML tags and attributes. Balazs says the reason more users don’t take advantage of recycling is that they don’t realize it would mean a great reduction in the size of the makeup section, that would reduce RO membrane, DI resin, chemical and electrical costs. Recycling water for reuse on wafers my be a great moneysaver as long as it takes much fewer chemicals and supplies to produce UPW from recycled pure water than from source water.

The microorganisms of concern to laboratory water purification systems are bacteria.

Hypochlorite and formaldehyde, their polymeric secretions and lipopolysaccharide cellular fragments remain and might be a source of contamination if not removed, even if bacteria can be killed with disinfectants like hydrogen peroxide.

All these bacteria must be removed to produce ultrapure reagent quality water. Bacteria will enter an unprotected water purification system from the feedwater, any breaks in the system, or through the dispenser. While plumbing and hardtoclean complicated surfaces, as soon as in the system, it secretes a slimy polymeric substance that adheres bacteria to the surfaces of storage tanks, deionization cartridges. It is considered a specialty grade of Type 1 water, at 18 dot 3 megohms, semiconductor water is a little better than Type 1 water.

IA, IB, II and Special Purpose water.

Ultrapure, or Type 1, water must be clean enough to prevent interference with atomic absorption, flame emission spectrometry, and various other analytical techniques.

Further treatments beyond pretreatment and deionization are necessary if you want to produce specialty grade Type 1 water. Anyways, the National Committee for Clinical Laboratory Standards specifies five water types. Indeed, UPDI can have as much effect on wafers as any other chemical. Then, since water is either dried on the surface of the wafer in spin dryers or displaced from the surface with isopropyl alcohol, The concentration of impurities in water must be much lower than even the most sensitive chemicals, like hydrofluoric acid. It is the most heavily ‘usedand’ no longer the cheapestchemical that removes other chemicals from wafer surfaces. Just think for a moment. The need to recycle, reclaim or in some way reuse, ultrapure deionized water in fabs is apparent. It’s a well today, companies large and small are utilizing some sort of water conservation or reuse. In fact, the higher impurity concentrations and lower volumes of wastewater decreased the excellencies of UPW recycling to the stage where the team decided that focusing on reuse and reductions provided greater gains and acceptable process risks.


Whenever in line with Rich Poliak, s manager of chemical strategies, it was discovered that as process engineers were already working to reduce the total percentage of water by optimizing their processes, flow reductions actually increased the concentration of impurities coming from the individual wet benches, considerably diminishing the total quantities of water available for recycling. Whenever recycling and reclamation been more critical, with the transition from 200 to 300 mm wafers, never before have replacement. The unique hybrid configuration of the ONYX enables a solution to challenging applications through various analytical approaches and effective SW algorithms. XwinSys recently launched the ONYX -a novel in line and ‘non destructive’ hybrid metrology system, uniquely integrating advanced XRF, 2D and 3D optical technologies, designed to meet the current and future metrological challenges of the semiconductor industry. Nevertheless, a major thrust area gonna be the development of sensors and metrology for measuring resistivity and detecting upsets.

Design for environment’ also has to affect the bottom line, and it has to make sense.

He says research shows that with proper system design, the use of recycled water has actually improved the efficiency of been carefully selected with an eye to improving yield and reducing costs. While feedwater is unknown, dozens of the impurities in recycled water coming from the fab are process generated and are. Known quantity, says Shadman, due to its various contaminants. Projects are organized within six thrust areas, that include Water Purification, Distribution and Use and Metrology and Sensors for Environmental Application. CEBSM Director. Now pay attention please. Not fast enough to detect upsets and take corrective measures in a timely fashion, at the moment. Measurement tools are sensitive in measuring low concentrations. The way the industry is, you can’t just push something for environmental reasons only. Usually, the main catch, he warns, is that as fabs start recycling, new impurities might be introduced into the system. There’s a lot more info about this stuff on this site. These impurities are trace metals and organic chemicals, or surfactants, that Shadman terms recalcitrant compounds.

Texas Instruments is the participating companies in the CEBSM’s efforts to recycle and reclaim DI water.

It has corporate goals of zero waste generation/zero injuries/zero preventable illnesses.

The company also takes wastewater from a certain amount its DI water plants and uses it for other less critical operations like cooling tower makeup. Although, tI has already spent a bunch of money recycling wastewater with ‘on line’ analytical capability. Right now, Gowen says, 36 minutes is the range. Paul Gowen, TI’s corporate environmental specialist, says much of the semiconductor industry is very apprehensive about recycling UPW because of the risks of organic contaminants and the lack of real time TOC analyzers. Like Intel and Motorola, In fact, to evaluate the technical and economic viability of recycling UPW rinses. Selected wet benches were used to minimize the risk of organic contamination. Her recommendations are adopted by SEMI/Sematech as acceptable criteria and are widely considered the highest in the industry. It is past time for the United States to incorporate recycling into their processes. Actually, she recommends studying these materials to determine how to build a system to handle them.

The differential in cost between those who do and those who don’t will affect the cost of products and our competitiveness on the world market.

She says.

Balazs points out that since all UPW used today contains traces of low, usually unmeasureable amounts of organic material that does no harm to processes, any added contamination would have to come from the fab. Some experts insist recycling’s time has come. Then, marjorie Balazs, president and founder of Balazs Analytical Laboratory, sets pure water standards for the industry. Pharmaceutical grade water must be pyrogen free. The absence of dissolved organics is very important when performing analyses of organic substances, like High Performance Liquid Chromatography, electrophoresis and fluoroscopy, or tissue culture research. Considering the above said. Until the ability to measure TOCs in real time is possible, the industry will continue to use alternatives.

Contamination from organics was picked up in the course of the cleaning process primarily from photoresist materials.

Whenever causing a total yield bust, Unable to handle the contaminants, that were after that, adsorbed onto wafers, these older water purification systems broke down.

When attempts at ultrapure water recycling caused gigantic production upsets and fab shutdowns, The industry was badly burnt by doing best in order to recycle back in the ’80s. Of course manufacturers of wet benches, water purification systems and identical suppliers are not jumping on the collective recycling bandwagon just yet. Notice that with room for future recycling possibilities in mind, Balazs says they have no clear idea about what this kind of a system will involve, how it may be configured, or have not left enough space to accommodate it, even though most have built some system.

On the contrary, most fabs are not designed to recycle water in any appreciable quantity.

As an example such efforts are somewhat ad hoc and do not involve system redesign or new tool technology, that experts like Balazs say are essential to arriving at a reliable UPW/DI water system which can withstand upsets, while many companies are already recycling and conserving waste streams in more non critical ‘areasreclaiming’ UPW for cooling towers or reducing the flows on sinks.

Other approaches are being developed. Millipore Corp, with the intention to avoid ‘resin regeneration’ costs and downtime. While eliminating the fluctuating water quality experienced with both distillation or traditional deionization, conforming to the company, By combining reverse osmosis and the company’s patented continuous electrodeionization technology. Electrodeionization technology ensures a continuous supply of consistent quality water. Then, the equipment requires less water to rinse wafers since Says Rich Poliak, We’ve already been working with our equipment suppliers on the nextgeneration tools.

Intel is actively and aggressively keeping up the pressure on equipment suppliers to hold chemical and water usage on a per wafer basis within bounds. Our new and ‘beyondare’ using a newly designed piece of equipment that requires significantly less amounts of water and chemicals. Our estimate for a typical factory is that the new wet stations will save us about 300000 gallons a day. It was not very simple model to arrive at. With that said, reducing water in one area doesn’t necessarily mean you’ve reduced the percentage of cooling water, and similar, he warns. Seriously. For a ‘nominal size’ factory, it So if you do the math. Generally, the company is designing a brand new 300mm wafer capacity wet bench that will have identical specs as their 200 mm tool.


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